Fulfilled R&D projects

Natural vibrations of micromechanical accelerometers

Keywords Micromechanical accelerometer, sensitive element, modal analysis
Programs in use ANSYS
Project period 2003
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First and second natural mode shapes
of the microaccelerometer for measuring accelerations
in the plane of the sensitive element (animated GIFs)

 

                    

First and second natural mode shapes
of the microaccelerometer for measuring accelerations
in the plane normal to the sensitive element (animated GIFs)